Parker products
Diaphragm Valves
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17R Series
Introduction
The 17R Series valve provides a high flow and positive shut off for high purity fluid systems.
This 1/2” spring type diaphragm valve offers superior leak integrity for manually and pneumatically actuated versions with pressure ranges from vacuum to 3,000 psig.
18R Series
Introduction
The 18R Series valve provides high flow and positive shut off for high purity fluid systems.
This 1/2” and 3/8” spring type diaphragm valve offers superior leak integrity for manually and pneumatically actuated versions with pressure ranges from vacuum up to 1500 psig.
830 Series
Introduction
Parker Hannifin Corporation’s Veriflo Division presents the 830 valve for use in solar and semiconductor applications. The 830 has many of the 930 Series valve features but at a lower price point.
The maximum operating pressure for the manual valve is 300 psig. In addition, the 830 offers a LP (125 psig) and a new MP (300 psig) air actuation versions.
845 Series
Introduction
The 845 Series diaphragm valves provides high pressure flow control for semiconductor, solar, and flat panel applications. The design provides high pressure and high flow in a compact device.
The 845AOPHP valves offer operating conditions from vacuum to 3500 psi with the newly designed and patent pending actuator. The new actuator requires only 75 psi actuation pressure for all pressure control applications and provides high cycle life.
930 Series
Introduction
The 930 Series valves are designed for ultra high purity applications for Semiconductor OEM and process wafer manufacturing.
The 930 Series is available with a variety of manual operators and air operated actuators. The air operated actuators are provided with an LP (125 PSI) or an MP (300 PSI) operating range.
The 300 psig operating pressure for both the manual and the AOPMP (mid-pressure) valves offers an extended application range for this product series.